LAM Etchers & Parts For Sale

LAM equipment and parts are divided into 2 sections on this page:

1) parts and systems we HAVE AVAILABLE and/or we HAVE A CONDITIONAL PURCHASE ORDER ON, and

2) parts and systems we may be able to SOURCE and/or have SOLD.

  1. Parts and Systems we HAVE AVAILABLE and/or we HAVE A CONDITIONAL PURCHASE ORDER ON:

    • LAM 590 (multiple)

    • LAM 9600 (multiple)

    • LAM Alliance A9608PTX, 4 PMs

    • LAM A6 9400DFM

    • LAM A6 9400PTX

    • LAM A6 9400DSiE

    • LAM A6 9400SE

    • LAM A6 PMs ("chambers")

    • LAM A6 TM

    • LAM A4 4420XL

    • LAM TCP 9400SE (LAM 9400SE)

    • LAM TCP 9600SE (LAM 9600SE)

    • LAM TCP 9600 (LAM 9600)

    • LAM Enhanced Digital Gas Box

    • LAM Rainbow 4428 (LAM 4428)

    • LAM Rainbow 4528 (LAM 4528)

    • LAM Rainbow 4528i (LAM 4528i)

    • LAM Rainbow 4520 (LAM 4520)

    • LAM Rainbow 4520XL (LAM 4520XL)

    • LAM Electrostatic Chuck/ESC Power Supply for LAM TCP 9400/TCP 9600 Systems

      • LAM Electrostatic Chuck/ESC Power Supply, Part Number: LAM 853-025054-018

      • LAM Electrostatic Chuck/ESC Power Supply, Part Number: LAM 853-025054-010

      • LAM Electrostatic Chuck/ESC Power Supply, Part Number: LAM 853-025054-003

      • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: LAM 810-017086-018

      • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: LAM 810-017086-010

      • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: LAM 810-017086-003

      • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: LAM 810-017086-008

    • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: LAM 810-017086-006 Mother Board

    • LAM Switching Power Supply, Part Number: LAM 660-093827-001, 7 DC outputs

    • LAM Electrostatic Chuck/ESC Power Supply Assy, Part Number: LAM 853-025054-116 w/ LAM 810-017086-106

    • LAM Paddle Lifter Assembly, Part Number: 853-032776-002 / 853-021924-003

    • LAM CPU 3 Board, Part Number: LAM 810-017034-003

    • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: LAM 810-017086-008 Mother Board

    • LAM A4 Alliance CPU Board, Part Number: LAM 810-057050-003

    • LAM CPU Board, Part Number: LAM 810-017034-300

    • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: LAM 810-017086-106 Mother Board

    • LAM A4 Alliance CPU Board, Part Number: LAM 810-057050-003

    • LAM Electrostatic Chuck/ESC Power Supply Assy, Part Number: LAM 853-025054-004 w/ LAM 810-017086-004

    • LAM / Advanced Energy 5" Diffuser, Part Number: LAM 716-006446-001, for LAM 490/590 AutoEtch

    • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: LAM 810-017086-670

    • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-003

    • LAM Alliance 12-Channel Gas Box Control Module Assembly

    • LAM Alliance 12-Channel Gas Box Boards

    • LAM Alliance 8-Channel Gas Box Control Module Assembly

    • LAM Electrostatic Chuck/ESC Power Supply Assy, Part Number: 853-025054-006 w/ 810-017086-106

    • Brooks Assy PCB VT5 Main, Brooks Part Number: 001-1951-05, LAM Part Number: 810-550099-001 Rev E1

    • LAM Switching Power Supply, Part Number: 660-091820-001, 24V / 25 amp

    • LAM ADIO 4 Board, Part Number: 810-017031-004

    • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-002 Mother Board

    • LAM ESC Power Supply Assy, Part Number: 853-025054-005 w/ 810-017086-002 Board

    • LAM Electrostatic Chuck/ESC Power Supply Assy, Part Number: 853-025054-012 w/ 810-017086-006

    • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-012 Mother Board

    • LAM O-rings

    • Varian 959 helium leak detector

    • Varian Leak Detector Power Probe for Varian 959 Leak Detector, Part Number: 0991-K9565-301

    • LAM TCP 9600SE PLATE, WINDOW CHBR 715-031454-001

    • LAM switching power supply, Part Number: 660-091820-001 24v/25amp

    • LAM 716-029504-008

    • LAM 716-011830-001 Focus, Ring Alm, Waf, Clp

    • LAM 716-117501-151

    • LAM 716-001175-289

    • LAM 716-003544-108

    • LAM 716-330061-008 Ring,Gas, Pro, Shower

    • LAM 716-331100-001 R, EDGE, 6", FL, BOT, CER

    • LAM 716-028249-061 Focus Ring ESC-1

    • LAM 716-011754-003 Focus, Ring

    • LAM 716-140432-002 Upper Keyed Ring 4520XL

    • LAM 716-028545-152

    • LAM 716-020905-001 355mm Ring, Filter, Low Clamp

    • LAM 716-031453-001 Lower Chamber Filter Ring

    • LAM 716-160260-001 Lower Chamber Ring Filter

    • LAM 716-011580-144

    • LAM 716-330004-008 Ring, Focus,ESC, 8", HI-Cond

    • LAM 716-011759-016 Ring Edger Focus

    • LAM 716-330167-268 Clamp, 6", Jeida

    • LAM 716-330167-181 Plate Wafer Clamp

    • LAM 716-330890-001 Clamp Ring

    • LAM 716-330760-002 URMG MOD Shadow Clamp

    • LAM 716-011963-003 Plate Clamp

    • LAM 716-051054-001 QTZ Shield Section. Top Plate

    • LAM 716-020904-018 Ring, Edge Focus, LWR Clamp

    • LAM 713-028281-003 Ring Confinement

    • LAM 713-100180-503

    • LAM 713-028318-001

    • LAM 713-029106-001

    • LAM 713-071681-002

    • LAM 713-011666-005

    • LAM 713-011650-004

    • LAM 713-018614-304

    • LAM 713-028281-003 no result

    • LAM 716-011830-001 Focus Ring, 4"W

    • LAM 716-033167-261

    • LAM 716-003544-002

    • LAM 716-052311-002

    • LAM 716-185474-001

    • LAM 716-051158-162

    • LAM 716-028668-251

    • LAM 716-380017-001

    • LAM 716-330122-003 Sealed

    • LAM 716-440054-001

    • LAM 716-011923-001 Plate, Shadow Clamp

    • LAM 716-011755-001 Plate, 8" W/C Insert Carrie

    • LAM 716-443090-001

    • LAM 716-011543-002

    • LAM 715-051364-002

    • LAM 715-443130-001

    • LAM 660-009527-002

    • LAM 666-062659-001 Type K thermo couple probes

    • LAM 678-061017-001

    • LAM 678-061017-001

    • LAM 775-060712-001 Filter Inline 3/8"

    • LAM 799-901259-001

    • LAM 810-034807-101

    • LAM 810-550092-001 S3L3005 PCB Robot Encoder(FB)

    • LAM 810-001748-001

    • LAM 810-057032-001

    • LAM 810-017093-002

    • LAM 810-057067-003

    • LAM 810-800961-008

    • LAM 810-877433-001

    • LAM 810-001738-005

    • LAM 810-495586-001

    • LAM 810-800961-008

    • LAM 839-051689-002

    • LAM 853-055030-001 Assy Motorized Ball Valve

    • LAM 716-011580-144 New

    • LAM 716-011580-151 New

    • LAM 716-011580-141 New

    • LAM 716-011580-244 New

    • LAM 716-011580-146 New

    • LAM 716-011638-004 New

    • LAM 716-028033-001 New

    • LAM 716-028414-014 New

    • LAM 716-028668-053 New

    • LAM 716-028668-251 New

    • LAM 716-011563-063 New

    • LAM 716-011563-166 New

    • LAM 716-028635-001 New

    • LAM 716-011963-003 New

    • LAM 716-031782-001 New

    • LAM 716-011759-016 New

    • LAM 716-028760-001 New

    • LAM 716-011759-015 New

    • LAM 716-011764-181 New

    • LAM 716-011758-014 New

    • LAM 716-011563-156 New

    • LAM 716-011563-156 New

    • LAM 716-029504-008 New

    • LAM 716-029504-006 New

    • LAM 716-029504-005 New

    • LAM 716-028251-001 New

    • LAM 716-011650-004 New

    • LAM 716-249040-001 New

    • LAM 716-460953-001 New

    • LAM 716-018527-404 New

    • LAM 716-347266-001 New

    • LAM 716-011750-151 New

    • LAM 716-011754-003 New

    • LAM 716-072008-001 New

    • LAM 716-003544-002 New

    • LAM 716-330004-008 New

    • LAM 716-331099-001 New

    • LAM 716-011889-161 New

    • LAM 716-031535-001 New

    • LAM 716-028489-001 New

    • LAM 716-011624-005 New

    • LAM 716-000144-001 New

    • LAM 716-011763-008 New

    • LAM 716-031535-003 New

    • LAM 839-051689-002 New

    • LAM 716-038657-418 New

    • LAM 716-030140-003 New

    • LAM 716-011651-006 New

    • LAM 716-011580-144 New

    • LAM 716-140038-001 New

    • LAM 716-028668-251 New

    • LAM 716-028721-281 New

    • LAM 716-011750-043 New

    • LAM 716_071623-001 New

    • LAM 716-331100-001 New

    • LAM 716-011053-002 New

    • LAM 716-330061-008 New

    • LAM 716-460216-001 New

    • LAM 716-249040-002 New

    • LAM 713-018614-304 New

    • LAM 713-028281-003 New

    • LAM 810-057018-001 New

    • LAM 810-057067-003 New

    • LAM 716-249040-002 New

    • LAM 716-028251-161 New

    • LAM 716-330741-002 New

    • LAM 716-011963-003 New

    • LAM 716-028447-002 New

    • LAM 716-031535-006 New

    • LAM 716-011624-005 New

    • LAM 716-038657-533 New

    • LAM 716-021049-141 New

    • LAM 716-038657-418 New

    • LAM 716-028296-001 New

    • LAM 716-018527-181 New

    • LAM 716-025080-001 New

    • LAM 716-029504-005 New

    • LAM 716-031635-002 New

    • LAM 716-072305-002 New

    • LAM 716-380017-001 Clamp TP Wafer DMD Show Minor

    • LAM 716-140118-001 New

    • LAM 716-330122-002 New

    • LAM 716-250080-001 New

    • LAM 716-029504-008 Ring, Edge, Water Clamp, 8"

    • LAM 716-031535-001

    • LAM 716-331100-001 R, Edge, 6" ESC, Fl, BOT, CER

    • LAM 716-004607-001 Ring, Filter, 10.75 ID GNP PLT D

    • LAM 716-011750-289 Ring Insert, 8"/Notch

    • LAM 716-140139-218 New

    • LAM 716-011764-281 New

    • LAM 716-011624-001 New

    • LAM 716-011563-152 New

    • LAM 715-011986-008

    • LAM 715-028771-001

    • LAM 715-249056-001

    • LAM 715-021050-001

    • LAM 715-028172-001

    • LAM 715-051364-002

    • LAM 715-250593-001

    • LAM 715-011746-154

    • LAM 716-028289-001

    • LAM 715-011531-008

    • LAM 715-028289-001 Ring Clamp Upper Electrode

    • LAM 715-028552-001 Clamp, Upper Ring Electrode

    • LAM 715-051364-002

    • LAM 715-011746-166

    • LAM 715-011531-015 Electrode, Alum, Anodized, 6"

    • LAM 715-011502-001 Ring, Upper Electrode

    • LAM 715-011559-262 Clamp, Wafer

    • LAM 715-030138-001

    • LAM 715-011647-004

    • LAM 715-330984-001 Bottom Gas Ring

    • LAM 715-011531-011

    • LAM 715-011535-100

    • LAM 715-011746-166

    • LAM 715-011531-016

    • LAM 715-011535-100

    • LAM 715-021051-001

    • LAM 715-028552-001

    • LAM 715-011531-014

    • LAM 715-051364-002

    • LAM 715-011746-166

    • LAM 715-028434-001

    • LAM 715-028289-001

    • LAM 715-051364-002

    • LAM 715-011746-166

    • LAM 715-028289-001

    • LAM 605-060911-001

    • LAM 716-044057-108

    • LAM 810-800961-008

    • LAM 716-011754-003

    • LAM 716-117501-151

    • LAM 716-330121-014

    • LAM 716-020904-018

    • LAM 713-100180-503

    • LAM 716-028545-152

    • LAM 716-011963-003

    • LAM 716-330760-002

    • LAM 716-330167-181

    • LAM 716-443090-001

    • LAM 716-011830-001

    • LAM 716-003544-002A

    • LAM 716-011531-102

    • LAM 715-028289-001

    • LAM 715-011741-166

    • LAM 716-011531-014

    • LAM 715-028552-001

    • LAM 715-051304-002

    • LAM 715-011746-166

    • LAM 715-011535-100

    • LAM 715-028552-001

    • LAM 715-021051-001

    • LAM 716-331100-001

    • LAM 716-011923-001

    • LAM 716-331100-001

    • LAM 716-011830-001

    • LAM 716-003644-002

    • LAM 810-550092-001

    • LAM 839-051089-002

    • LAM 839-051689-002

    • LAM 666-062659-001

    • LAM 678-061017-001

    • LAM 713-028281-003

    • LAM 810-800961-008

    • LAM 713-028281-003

    • LAM 716-330122-003

    • LAM 853-055030-001

    • LAM 716-052311-002

    • LAM 716-052311-002

    • LAM 775-060712-001

    • LAM 810-057032-001

    • LAM 810-057067-003

    • LAM 810-017048-001

    • LAM 715-051364-002

    • LAM 678-061017-001

    • LAM 799-901259-001

    • LAM 810-017038-005

    • LAM 810-011433-001

    • LAM 799-901259-001

    • LAM 660-095275-002

    • LAM 660-095275-003

    • LAM 796-006238-011

    • LAM 796-006238-002

    • LAM 853-025735-001

    • LAM 853-025903-001

    • LAM 353-250001 AC Controller

    • LAM 660-093818-003

    • LAM 895-994188-1

    • LAM 122958200

    • LAM 853-004643-001

    • LAM 660-093818-002

    • LAM 716-051054-002

    • LAM 716-051054-001

    • LAM 380-877702-001

    • LAM 605-060911-001

    • LAM 775-060712-001

    • LAM 715-011912-083

    • LAM 715-030136-004

    • LAM 715-011535-100

    • LAM 715-011912-083

    • LAM 713-028318-001

    • LAM 715-028615-002

    • LAM 715-028552-002

    • LAM 715-011531-011

  2. Parts and Systems we may be able to SOURCE and/or have SOLD:

    Parts

    • LAM ADIO 8 Board 810-017050-001

    • LAM 590 AutoEtch Board 810-091934-001

    • LAM motor exit load lock assembly 853-091949-002

    • LAM RF Coil 853-330142-060

    • LAM RF Coil 853-330142-080 (We do not have one in stock, but we have a full refurbishment program including silver-plating to refurbish your coil, and we buy any non-working / poor condition coils.)

    • LAM 590 Auto Etch Gap (rebuilt by AAZ Equipment)

    • LAM AutoEtch Gap Drive Assembly 853-090260-004

    • LAM ESC Power Supply Board for a LAM TCP, Part Number: 810-370182-001

    • LAM shower head 716-006711-001

    • LAM diffusers

    • LAM TCP APM spin station assembly, Part Number: 853-015876-101

    • LAM TCP VAT Valve, Part Number: 796-090807-102

    • LAM TCP Retainer Universal Window, Part Number: 715-011039-001

    • LAM TCP window / quartz, Part Number: 716-011009-001

    • C16-13172B Gas Spring for LAM TCP

    • LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-002

    • LAM 5" diffusers for AutoEtch 490/ LAM AutoEtch 590

    • LAM Electrode (Electrostatic Chuck/ESC) for LAM TCP 9600, Part Number: 718-094756-081

    • LAM TCP 9600SE Ring, FOR, LWR CHAMBER, ESC

    • LAM TCP 9600SE Ring, RING, FOCUS 8”, GD RING

    • LAM TCP 9600SE Computer

    • LAM TCP 9600SE ASSY, GATE DRIVE, INNER DOOR (entrance and exit)

    • LAM TCP 9600SE VALVE, ISO VALVE, KF-50 rebuild kit

    • LAM TCP 9600SE WDO, RF SHPD CER, FXD GAPN/ # 10/EB, Part Number: 716-330121-001

    • LAM TCP 9600SE Gas Line

    • LAM TCP 9600SE FLANGE, WINDOW, TURBO PUMP TC

    • LAM TCP 9600SE Gas Box

    Systems

    • LAM A6 DSiE

    • LAM A6 9400DFM

    • LAM A6 9600DFM

    • LAM 9600SE

    • LAM 9600SE II

    • LAM Auto Etch 490

    • LAM Auto Etch 590

    • LAM Auto Etch 690

    • LAM Auto Etch 790

LAM RF Coil

LAM Lifter Assembly

LAM Mini Match

AAZ Equipment

Bay Area / San Jose, California

info@AAZequipment.com