LAM Etchers & Parts We Want

Parts

• URGENT: LAM Paddle Lifter Assembly, Part Number: 853-032776-002

• Most LAM parts, especially for 9600 and Alliance systems

• LAM ADIO 4 Boards

• LAM ADIO 8 Board 810-017050-001

• LAM RF Coil 853-330142-060

• LAM RF Coil 853-330142-080

• LAM ESC Power Supply Board for a LAM TCP, Part Number: 810-370182-001

• LAM TCP VAT Valve, Part Number: 796-090807-102

• LAM TCP Retainer Universal Window, Part Number: 715-011039-001

• LAM TCP window / quartz, Part Number: 716-011009-001

• LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-002

• LAM Electrode (Electrostatic Chuck/ESC) for LAM TCP 9600, Part Number: 718-094756-081

• LAM TCP 9600SE Ring, FOR, LWR CHAMBER, ESC

• LAM TCP 9600SE Computer

• LAM TCP 9600SE ASSY, GATE DRIVE, INNER DOOR (entrance and exit)

• LAM Paddle Lifter Assembly, Part Number: 853-032776-002

• LAM A6 Gas Box

• LAM TCP 9600SE Gas Box

Systems

• LAM AutoEtch 590

• LAM 4600 parts tool / cheap tool (with Envision preferred but not necessary)

• Any LAM A6 (Transfer Module / TM) or A6 chambers (Process Module / PM)

• LAM A6 Exelan (zero or one process module preferred)

• LAM A6 DSiE

• LAM A6 9400DFM / 9600DFM

• LAM A6 9400PTX / 9600PTX

• LAM 9600SE

• LAM 9600SE II

• Some general interest in Auto Etch 490, Auto Etch 590, Auto Etch 690, Auto Etch 790